JPH0198470U - - Google Patents
Info
- Publication number
- JPH0198470U JPH0198470U JP19556587U JP19556587U JPH0198470U JP H0198470 U JPH0198470 U JP H0198470U JP 19556587 U JP19556587 U JP 19556587U JP 19556587 U JP19556587 U JP 19556587U JP H0198470 U JPH0198470 U JP H0198470U
- Authority
- JP
- Japan
- Prior art keywords
- electrode spacing
- current density
- density distribution
- ion
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 238000000605 extraction Methods 0.000 claims description 2
- 239000000284 extract Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987195565U JPH0737232Y2 (ja) | 1987-12-22 | 1987-12-22 | イオンビーム照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987195565U JPH0737232Y2 (ja) | 1987-12-22 | 1987-12-22 | イオンビーム照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0198470U true JPH0198470U (en]) | 1989-06-30 |
| JPH0737232Y2 JPH0737232Y2 (ja) | 1995-08-23 |
Family
ID=31486240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987195565U Expired - Lifetime JPH0737232Y2 (ja) | 1987-12-22 | 1987-12-22 | イオンビーム照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737232Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004014422A (ja) * | 2002-06-11 | 2004-01-15 | Matsushita Electric Ind Co Ltd | イオン注入装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60258840A (ja) * | 1984-06-04 | 1985-12-20 | Mitsubishi Electric Corp | 反応性イオンビ−ムエツチング装置 |
-
1987
- 1987-12-22 JP JP1987195565U patent/JPH0737232Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60258840A (ja) * | 1984-06-04 | 1985-12-20 | Mitsubishi Electric Corp | 反応性イオンビ−ムエツチング装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004014422A (ja) * | 2002-06-11 | 2004-01-15 | Matsushita Electric Ind Co Ltd | イオン注入装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0737232Y2 (ja) | 1995-08-23 |